| Abstract | In this paper, we present a preliminary research effort towardsan effective computer support environment for the design and
development of micro-electro-mechanical systems (MEMS).
We first identify the characteristics of MEMS product design
and development processes and examine the state-of-the-art of
MEMS Computer-aided Design (CAD) and simulation systems.
We then propose a function-(environment-effect)-behavior-
(principle-state)-form (FEEBPSF) framework based on the
NIST core product model and its extensions for modeling
MEMS products, and apply the OESM (open embedded system
model) developed to model information and knowledge for
embedded MEMS design and development. Moreover, in order
to tackle the knowledge-intensive tasks of design and
development for MEMS products, we develop a general and
flexible knowledge repository, called KR-MEMS, based on the
FEEBPSF framework and the Unified Modeling Language
(UML)/ Extensible Markup Language (XML) model, and
integrate KR-MEMS into a web-based MEMS design support
system. Throughout the paper, a micro fluidic dispensing device
(a biomedical device for drug-delivery) is used as an example to
illustrate the concepts, models, and knowledge bases necessary
to support the MEMS product design and development.
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